Slurries for Silicon and Poly-Silicon

Our slurries for Silicon and Poly-Silicon applications are designed to increase performance and reduce surface roughness faster.

Surface+ for Silicon:

  • 20% higher MRR and over 30%TTV improvement vs conventional stock slurries
  • 2X faster in roughness reduction & planarization as vs industrial benchmark
  • Can be diluted to 30X or more
  • Recyclable for further CoO reduction

ZSL200 for Poly-Silicon:

  • 2X removal rate over industrial benchmark
  • Comparable defectivity performance
  • Intrinsic particle chemistry and proprietary dispersant enables high dilution ratio for CoO improvement
  • Around 30% less defects than benchmark
Slurries for silicon-poly-silicon