Slurries for Silicon and Poly-Silicon
Our slurries for Silicon and Poly-Silicon applications are designed to increase performance and reduce surface roughness faster.
Surface+ for Silicon:
- 20% higher MRR and over 30%TTV improvement vs conventional stock slurries
- 2X faster in roughness reduction & planarization as vs industrial benchmark
- Can be diluted to 30X or more
- Recyclable for further CoO reduction
ZSL200 for Poly-Silicon:
- 2X removal rate over industrial benchmark
- Comparable defectivity performance
- Intrinsic particle chemistry and proprietary dispersant enables high dilution ratio for CoO improvement
- Around 30% less defects than benchmark
