Saint-Gobain Surface Conditioning ClasSiC™ alumina polishing slurries are high-precision slurries specifically formulated for the chemical mechanical planarization of silicon carbide wafers used in the fabrication of LED and power electronic devices. Made with Saint-Gobain’s nano alumina abrasives, ClasSiC™ CMP slurries greatly enhance removal rate and planarization performance, delivering an excellent surface finish on SiC wafers.

ClasSiC™ slurries are formulated with high-efficiency permanganate oxidizers, tightly sized engineered nano-particles, and accelerant chemistries that facilitate very low surface finish, defectivity and sub-surface damage on all SiC surfaces. These unique slurries provide exceptionally low TTV, LTV, and Warp values and deltas. ClasSiC™ slurries offer colloidal and oxidative stability, making them easy to manage and clean, thanks to Amberclean SCA17, developed specifically for ClasSiC™.

Benefits - ClasSiC™

• Exceptionally high removal rate
• Excellent surface finish
• Very low TTV
• Very low LTV
• Very low warp
• Very low scratch potential and defectivity
• Provides epi-ready surface of Si terminated side
• Excellent dispersion, cleanability and oxidative stability

Benefits - Amberclean SCA17

• Highly efficient cleaner which degrades permanganate and aids in removing stuck/ surface bonded particle
• Shelf-stable formulation: no eventual deactivation and no outgassing/ bloating during storage
• Formulated without the use of VOC’s
• Intended to be used for all cleaning needs where ClasSiC slurries come in contact with – wafers, pads, tooling, and factory surroundings