Saint-Gobain Surface Conditioning ClasSiC™ alumina polishing slurries are high-precision slurries specifically formulated for the chemical mechanical planarization of silicon carbide wafers used in the fabrication of LED and power electronic devices. Made with Saint-Gobain’s nano alumina abrasives, ClasSiC™ CMP slurries greatly enhance removal rate and planarization performance, delivering an excellent surface finish on SiC wafers.
ClasSiC™ slurries are formulated with high-efficiency oxidizers, tightly sized engineered nano-particles, and accelerant chemistries that facilitate very low surface finish, defectivity and sub-surface damage on all SiC surfaces. These unique slurries provide exceptionally low TTV, LTV, and Warp values and deltas. ClasSiC™ slurries offer colloidal and oxidative stability, making them easy to manage and clean.
Contact us to learn how Saint-Gobain will work with you to formulate a custom ClasSiC slurry for your unique CMP requirements.