Cleaners for Semicon
Aqueous Particles Cleaner
AmberClean™ 527D is a biodegradable, aqueous particle cleaner which does not contain volatile organic compounds (VOCs). It is specifically formulated to flush and disperse particles and process contaminants from substrate surfaces in semiconductor applications.
Additionally, the surfactant technology employed by AmberClean 527D is designed to cut through and remove aluminum oxide/colloidal silica/zirconia slurries and process chemicals from substrates without leaving films or residues. This formula should be diluted with deionized water and can be used in soak tanks, ultrasonic tanks and contact cleaning systems, in addition to high pressure spray cleaning equipment.
Aqueous Glass Cleaner
AmberClean™ GC95L is a biodegradable, aqueous cleaner which does not contain volatile organic compounds (VOCs). It is specifically formulated to flush and disperse glass, ceramic and other lapping and slicing fines from substrate surfaces. Additionally, the surfactant technology employed by AmberClean GC95L is designed to cut through and remove cerium oxide, aluminum oxide, diamond and silicon carbide, as well as other process residues without harming delicate glass or ceramic substrates. A 1% solution of AmberClean GC95L effectively lowers surface tension <25 dynes/cm.
Aqueous Ceramic Cleaner
AmberClean™ SCA23R is a biodegradable, aqueous cleaner which does not contain volatile organic compounds (VOCs). It is specifically formulated to clean and disperse sapphire, SiC and other ceramic lapping and polishing fines as well as aluminum oxide, diamond, silicon carbide and silica abrasives. Additionally, the surfactant technology employed by AmberClean SCA23R is designed to cut through and remove, and other process residues without harming ceramic substrate surfaces. AmberClean SCA23R also removes metal oxidie and carbon stains, which can be left by lapping plates.
Highly Efficient Cleaners
AmberClean SCA17 is developed specifically for ClasSic Slurries to offer colloidal and oxidative stablity, making them easy to manage and clean.
Benefits - Amberclean SCA17
- Highly efficient cleaner which degrades permanganate and aids in removing stuck/ surface bonded particle
- Shelf-stable formulation: no eventual deactivation and no outgassing/ bloating during storage
- Formulated without the use of VOC’s
- Intended to be used for all cleaning needs where ClasSiC slurries come in contact with – wafers, pads, tooling, and factory surroundings