AmberClean™ SC14 is a high purity aqueous cleaner formulated with a unique inhibitor which protects against corrosion of reaactive alloys of cobalt, iron, nickel and copper. It was developed using advanced cyclic polarization testing on blanket metal alloy wafers.
AmberClean SC14 also excels in protecting exotic metals such as iridium and ruthenium. It also contains advanced particle dispersants that effectively remove abrasive particles and process swarf from device surfaces and process tools. The powerful surfactants in AmberClean SC14 remove process fluid residues and contaminants associated with the manufacture of sensitive microelectronic components. It's designed to rinse completely with deionized water without leaving films or residues.
|Appearance||Clear, amber liquid|
|Specific gravity, 20°C||1.03|
|Surface tension (2%), dynes/cm||28.5|
AmberClean™ SC14 should be diluted with deionized water to a concentration of 1.0% to 5.0%.