Saint-Gobain Surface Conditioning's NanoSoft Alumina Slurry is a high-purity transitional phase alumina manufactured under tightly controlled environments to ensure batch-to-batch product consistency.
The NanoSoft alumina particles come dispersed in water and are pH adjusted for stability. With its fine nanometer particle size distribution, NanoSoft Alumina is supplied fully dispersed and stable. The soft alumina particles are transparent and feature lower turbidity compared to some colloidal silicas.
The hardness of this particle, defined by its transitional phase composition, is slightly lower than an alpha alumina particle, making it an excellent choice for demanding defectivity requirements.
Available in a standard size of 50 nm, Saint-Gobain NanoSoft Alumina can be customized by size, morphology and hardness to provide superior finishing in specific applications.
When used in select chemistry packages, NanoSoft Alumina slurry provides good removal rates and selectivity in applications such as Cu CMP with superior defectivity performance.
|Appearance||Transparent / opaque|
Size: 50 nm. Custom sizes available upon request.